
precision automatic measurement, CNC full closed-loop control, to ensure accuracy and stability;
High resolution industrial camera to ensure high quality measurement picture;
A variety of specifications of light source flexible collocation control, to ensure the lighting effect;
Automatic magnifying optical lens, can realize automatic magnifying measurement;
The quick focus of the lens within 2 seconds greatly improves the measurement efficiency;
Rapid selection, retest and system analysis of measurement results;
Adopts patch grating with resolution of 0.5um;
Can be equipped with contact probe and spectral confocal sensor to realize composite measurement.
The software is convenient to operate and easy to learn, and the display interface can be customized
Equipment Parameters | ||||||||
Basic parameters | Model | Enhance Pai 322 | ||||||
Size (L * W * H) | 640*820*1628 mm | |||||||
Measuring range(X*Y*Z) | 300*200*200 mm | |||||||
Measurement accuracy | Ex,y | Exy | Ez | |||||
≤±(2.0+L/200)um | ≤±(2.5+L/200)um | ≤±(3.0+L/150)um | ||||||
* The accuracy of the equipment can be guaranteed under the conditions of the environment in which the equipment is used * L represents the measured length, in millimeters * The mechanical accuracy of Z-axis and the accuracy of focusing have a lot to do with the surface of the workpiece (focusing time is about 2 seconds) | ||||||||
Repeatability | X,Y≤2.0um , Z≤3.0um | |||||||
Maximum operating speed | X,Y | Z | ||||||
300mm/s | 200mm/s | |||||||
Maximum acceleration | 800mm/s2 | 500mm/s2 | ||||||
Machine load-bearing | 20kg | |||||||
Machine weight | 570 kg | |||||||
Optical system | Camera | High-resolution industrial camera | ||||||
Lens | 6.5:1 Automatic zoom lens | |||||||
Focal diatsnce/Depth of field | 82mm/0.25mm | |||||||
Magnification | Optical ejection magnification | Image zoom | ||||||
0.7~4.5X | 40X~260X | |||||||
Light source lighting system | coaxial light (white LED cold light source), rim light (white LED cold light source) ,ring light (white LED cold light 3 ring 8 areas) | |||||||
Motion system | Grating ruler | 0.5μm high-resolution metal grating | ||||||
Motor | X-axis | Y-axis | Z-axis | |||||
DC servo motor | DC servo motor | AC servo motor | ||||||
Software | Lead rail | Three-axis precision slides | ||||||
Software system | Smart Inspector Pro | |||||||
Software measurement system | PC configuration | HP_ Computer 288ProG9MT/NewCorei5-12500 (3.0G/6 cores)/16G/512 SSD/ No optical drive/wired keyboard and mouse, keyboard /HP_ Display_V24IE G5(24 inches) (The actual configuration is subject to the factory, not lower than the above configuration) | ||||||
Optional | □Spectral confocal sensors □contact sensors □lifting &lowering light source □Smart Fitting PRO profile software □Line sweep laser sensor |
Unit view | ![]() | ||
Main view | Side view |
ONE-STOP MEASUREMENT SOLUTION



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- NANO Metrology is a renowned provider of geometric measurement solutions, specializing in opticameasurement and automation intelligent vision technology. The company has obtained multiple coretechnology patents and has been honored with the title of National High-Tech Enterprise. Additionally.NANO M
- NANO Metrology is a renowned provider of geometric measurement solutions, specializing in opticameasurement and automation intelligent vision technology. The company has obtained multiple coretechnology patents and has been honored with the title of National High-Tech Enterprise. Additionally.NANO M
- NANO Metrology is a renowned provider of geometric measurement solutions, specializing in opticameasurement and automation intelligent vision technology. The company has obtained multiple coretechnology patents and has been honored with the title of National High-Tech Enterprise. Additionally.NANO M